WebThe FRT MicroProf ® AP is a fully automated wafer metrology tool for a wide range of applications at different 3D packaging process steps, e.g. for the measurement of photoresist (PR) coatings and structuring, through … WebMar 25, 2024 · FRT GmbH MicroProf 100 - compact desktop tool150 mm x 100 mm measuring range (lateral)high measuring speed, max. 200 mm/s ... TTV option for double …
CONFIGURE YOUR CRITICAL DIMENSION OVERLAY FRT …
Webinfra-red sensors on a FRT Microprof®1 equipment. The TTV value is determined as the average thickness variation obtained for 5 various profiles of the 300 mm wafers. No edge exclusion is used to determine the TTV value. 3 Results and discussion 3.1 Effect of the coating The adhesive coating impact on the bonding TTV was first studied. WebThe FRT MicroProf 300 is perfect for these requirements and can also be integrated into fully automated production. An extensive range of sensors and the option of conducting double-sided sample inspections (TTV) … hotels popular for otakon
TOpOGraphy Film Thickness / layer sTack Metrology Capabilities
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