WebEmergency Plan for Plasma-Therm 790 Standard Operating Procedures for Emergencies Contact information Person Phone number Lab Manager Jake Hes, 949-824-8239 (day), … WebSep 8, 2024 · $69,999.99 Plasma Therm 790 Series Reactive Ion Etching / Plasma Enhanced System RIE Condition: Used “Please contact us by [email protected] if necessary. It was working except description. We did ”... Read more Price: US $79,500.00 Buy It Now Add to cart Add to Watchlist Pickup: Free local pickup from Morgan Hill, California, United …
Usage Policies Notebook for Plasma-Therm 790 - University …
WebUsage Policies for Plasma-Therm 790 RIE/PECVD Standard policies for usage The PlasmaTherm 790 RIE/PECVD performs reactive ion etching (Si-3 N 4, SiO 2, and GaAs) and plasma enhanced chemical vapor deposition (SiO 2 and Si 3 N 4). It uses inductively coupled RF plasma in two vacuum systems. The PECVD chamber side contains a heated base plate. WebDescription. Plasma Therm 790 Series PECVD Plasma Etch Chemical Vapor Deposition System. Model: 790 DEP MN Fr, Serial# PTI-78288. Including: Leybold TriVac, Neslab … q a skincare
Plasma-Therm 790 RIE (Reactive Ion Etcher) Basic …
WebEtcher RIE 790 Plasma Therm #2 Silicon Etch North Cleanroom 1.738 Read more Reactive Ion Etcher Features: up to 8“ wafers right chamber: CHF3 (54sccm), O2 (20sccm), H2 (20sccm), Ar (50sccm) left chamber: Cl2 (20sccm), HBr (100sccm), O2 (20sccm), CF4 (50 sccm), He (100sccm) turbo pump (10-5 Torr) Compatible Materials: WebPlasmaTherm 790 RIE . Parralell plate RIE with CF4, CHF3, SF6, O2, N2, He, and Ar . Username: 3333 . Password: 3333 . Idle condition check: −. Mechanical pump and turbo pump are both on . −. Both pumps will be green on the plumbing diagram . −. System Status is ON and in Standby or Ready mode . −. No active alarms . −. Ion gauge is ... WebPlasmatherm 790 Series Dry Etching, 8″ For Oxide or Nitride. Condition: We sell it at refurbished and upgraded condition with 12 months warranty. Location: Silicon Valley, CA, U.S.A. Installation and training: Available at … qasja ne dokumente publike